| X/Y-Axis Travel: | 800X600mm |
|---|---|
| Z-Axis Travel: | 200mm |
| X/Y/Z 3-Axis Linear Scale: | Imported Open Linear Scale, Resolution: 0.0001mm |
| Guidance Mode: | Imported P Grade Linear Guide,Double-Track Double |
| Operation Mode: | Joystick Controller, Mouse Operation, Automatic De |
| Measurement Accuracy: | Xy-Axis:<=2+L/200(Um),Z-Axis:<=;5+L/200(Um) |
