세라믹 스퍼터링 타겟

1.1 (세라믹 침을 튀기기 표적)
1.1. 1 (과민𝕜 원소 침을 튀기기 표적 물자):
B; 비스무트; 크롬; 재; Ru; Sb; Se; Te;
1.1. 2 (산화물 침을 튀기기 표적):
Al2O3; Bi2O3; Cr2O3; CuO; Cu2O; Fe2O3; Fe3O4; HfO2; In2O3; MGO; MoO3; Nb2O5; NbOx; NiO; PbO; Sb2O3; SiO; SiO2; ; Ta2O5, TaOx; TiO; TiOx; TiO2: ZrO2; V2O5; WO3; ZnO; ZrO2;
La2O3; CEO2; ND2O3; Sm2O3; EU2O3; Gd2O3; Tb4O7; Dy2O3; Ho2O3; Er2O3; TM2O3; Yb2O3; Lu2O3; Sc2O3; Y2O3;
1.1. 3 (질화물 침을 튀기기 표적):
AlN; 대대; HfN; NbN; Si3N4; TaN; TiCN; 주석; VN; ZrN
1.1. 4 (탄화물 침을 튀기기 표적):
B4C; Cr3C2; HfC; Mo2C; NBC; SiC; TAC; TiC; VC; W2C; WC; WC+Co; WC+Ni; ZrC
1.1. 5 (불화물 침을 튀기기 표적):
BaF2; CaF2; CeF3; DyF3; ErF3; HfF4; LaF3; LiF; MgF2; Na3AlF6; NaF; NdF3; PbF2; PrF3; SMF3; YbF3; YF3
1.1. 6 (규화물 침을 튀기기 표적):
CoSi2; CrSi2; HfSi2; MoSi2; NbSi2; NiSi2; TaSi2; TiSi2; VSi2; WSi2; ZrSi2
1.1. 7 (황𝕘물 침을 튀기기 표적):
As2S3; Bi2S3; CDS; CuS; Cu2S; FeS; FeS2; Ga2S3; GeS; In2S3; MOS2; NbS; PbS; Sb2S3; SnS2; TaS2; WS2; ZnS;
1.1. 8 (붕화물 침을 튀기기 표적):
CrB2; 2월; HfB2; LaB6; Mo2B; NdB2; TaB2; TiB2; VB2; WB2; ZrB2
1.1. 9 (셀렌 침을 튀기기 표적):
As2Se3; Bi2Se3; CdSe; CuSe; CuSe2; Ga2Se3; GeSe; InSe; In2Se3; MoSe2; NbSe2; PbSe; Sb2Se3; TaSe2; WSe2; ZnSe
1.1. 10 (Telluride 침을 튀기기 표적):
AG2Te; Al2Te3; Al2Te3; As2Te3; Bi2Te3; CdTe; 귀여운; Cu2Te; 문; Ga2Te3; GeTe; In2Te3; MoTe2; NbTe2; PbTe; Sb2Te3; SnTe; TaTe2; TmTe; ZnTe
1.1. 11 (안티몬화물 침을 튀기기 표적):
Bi2Sb3; GaSb; InSb; In2Sb3; PbSb
1.1. 12 (다른 높은 순수성 다 𝕩성 침을 튀기기 표적):
AgInS2; AgInTe2; BixSb1-xTe; CdInTe4; CuZnSnS; CIGS (CuInxGa1-xSe2); CIGSS (CuInxGa1-X (Se. S) 2); CuInSe2; GaxAl1-xAs; GeSbTe; PbxSn1-xAs; ZnIn2Te4; ZnxCd1-xTe;
1.1. 13 (다른 혼𝕩물 침을 튀기기 표적):
ATO (Sb2O3: SnO2); AZO (ZnO: Al2O3); GZO (ZnO: Ga2O3); IGZO (In2O3+Ga2O3+ZnO); ITO (In2O3: SnO2); IZO (ZnO: In2O3); YSZ (ZrO2: Y2O3); PZT (PbZrO3-PbTiO3)
BaTiO3; SrTiO3; PbTiO3; PbZrO3; SrZrO3; LaAl2O3; LaNbO3; LiNbO3; LSMO; Li3PO4;
크롬 SiO, ZrO2+SiO2; Al2O3+ZrO2; Al2O3+MGO; CaF2+CeF3; CuO+In2O3; Ta2O5+TiO2; Ta2O5+ ZrO2; TiO2+Nb2O5; TiO2+ ZrO2; YAG; YBCO;